EV Group's LITHOSCALE XT digital lithography system at Semicon

by J. Groh - 2025-12-02

EV Group is using Semicon to showcase key technologies for semiconductor manufacturing. This year, the focus is on a digital lithography system that significantly expands the speed and flexibility of previous processes. The equipment manufacturer emphasizes how closely technological development, customer requirements, and long-term innovation processes are linked.

Digital lithography Semiconductor manufacturing EV Group

Digital lithography as a focus of EV Group

The company has been one of the best-known manufacturers of equipment for lithography and wafer bonding processes for many years. Optical lithography in particular shapes the portfolio. The newly presented LITHOSCALE XT marks the further development of a system that was already considered a technological step forward: the previous version was able to process around ten wafers with a structure size of 300 millimeters per run, achieving resolutions in the range of two micrometers.

LITHOSCALE XT digital lithography system
Digital lithography system LITHOSCALE XT from EV Group increases wafer productivity

LITHOSCALE XT sets new standards in speed and flexibility

The new generation was introduced only recently and increases production output to up to 60 wafers per hour. This leap forward leads to a clear positioning in the industry standard. More decisive, however, is the system's digital mode of operation: each wafer can be individually inscribed without relying on fixed reticles. This creates scope for applications in cryptography, security features, or structures that must respond to changing substrate conditions.

Digital lithography system LITHOSCALE XT from EV Group

Complete digital mask layer as a unique technical feature

While classic steppers work with fixed, repeated exposure fields, the digital system treats the entire wafer as a variable mask. Each wafer can receive different patterns without the need to adjust physical masks. This principle is considered a key unique selling point, as it accelerates and individualizes manufacturing processes. Especially in areas where distortions or variances in the material occur, the technology enables immediate countermeasures.

Research, development cycles, and global competition

EV Group emphasizes how strongly research and customer-centric product development shape its own business model. New machines go through long development phases with several years between the idea and market readiness. The pressure to innovate is high, as the semiconductor industry is fighting for leading positions globally and major competitors are active, especially in the US and Asia. Nevertheless, the company sees a stable foundation for Europe – supported by process technologies and continuous innovation.

EV Group advances digital lithography Semicon Munich

European perspective on technology leadership

The semiconductor industry remains a global market in which speed and technological depth determine positioning. EV Group points out that long-term visions and the consistent further development of process technologies are the way to maintain market leadership. Innovation is not just a claim, but, in the company's opinion, the essential protective factor in international competition.